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Susceptors - Graphite Materials
WebAug 21, 2014 · During processing wafer rests on a SiC coated graphite susceptor. Heating inductively or with lamps. Reactors Veli-Matti Airaksinen. Advantages of the single wafer reactor • Heating by IR lamps: fast • Horizontal laminar gas flow: less autodoping • Very low particle levels • Excellent thermal profile: ... WebJan 1, 2024 · This study aims to investigate the corrosion of a SiC-coated graphite susceptor using NH 3 and Cl 2 in an epitaxial growth environment. The corrosion performance of NH 3 with graphite and SiC-coated graphite was investigated through microstructure characterization and mass loss rate changes in detail. Gaseous NH 3 had … can i have a tummy tuck if i\u0027m overweight
What is the best RF frequency for inductively heating a graphite susceptor?
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